Abstract

The piezodrive is used in nanophysics and nanotechnology, scanning microscopy, delivery DNA, compound telescope, interferometer and adaptive optics. The method mathematical physics is used to construct the block diagram of the piezodrive from the equation of reverse piezo effect and its ordinary differential equation for nanophysics and nanotechnology. The matrix transfer function of the piezodrive is obtained. The block dia grams of the piezodrive with the back electromotive force at distributed and lumped parameters are deter mined for nanophysics and nanotechnology.

DOI: doi.org/10.63721/26JPQN0156

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